报告题目(中文)：固相材料中电子束诱导的化学变化
报告题目(英文)：Beam induced chemical changes in solid phase
报告内容简介：Solid phase chemical reaction is not unusual, however, not general in material technology. Energetic ion or electron beam can be applied to induce chemical processes at interface of different materials. Beam assisted chemical reactions at or around interfaces of layers have the advantages: horizontal localization (limited only by beam spread) and patterning by beam manipulation, vertical (depth) control down to nm scale by choosing proper species and energy, low temperature is sufficient because the energetic beam provides activation energy to the chemical processes. A few material systems have been investigated applying Auger electron spectroscopy depth profiling for experimental observation of the new chemical phase produced by irradiation and TRIM code for interpretation. Examples will be presented for: formation of thermodynamically unstable Ni3C phase in Ni/C material system by ion beam modification, room temperature SiC formation in S/C layer system by ion beam modification, SiO2 formation on interfaces in less expected conditions by electron beam irradiation.
报告人姓名：Dr. Attila Sulyok
报告人简介(中文)：Dr. Attila Sulyok (Thin Film Group, Institute for Technical Physics and Materials Science Centre for Energy Research, Hungarian Academy of Sciences). He obtained PhD from E鰐v鰏 University, Budapest, Hungary in 1992 and became senior research fellow in 2002. He has published over 80 papers in surface analysis field on Auger electron spectroscopy, AES depth profiling (surface and thin film analysis), elastic peak and energy loss spectroscopy, experimental determination of inelastic mean free path, ion-solid interaction, ion bombardment induced alterations, XPS depth profiling (XPS analysis combined with ion sputtering). He has designed and built 3 instruments for surface analysis.
报告人简介(英文)：
报告人单位(中文)：Institute for Technical Physics and Materials Science Centre for Energy Research, Hungarian Academy of Sciences
报告人单位(英文)：
报告时间：2019-11-16 09:00
报告地点：材料B楼526会议室
主办单位：7003全讯白菜网
联系人：顾辉
